Determination of metastable and ground state density by method of effective branching fractions in Ar, Ar-Ti plasma

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Authors	DOSOUDILOVÁ Lenka NAVRÁTIL Zdeněk TRUNEC David VAŠINA Petr
Year of publication	2012
Type	Article in Proceedings
Conference	Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	branching fraction; argon; titanium; metastables
Description	An absorption method based on branching fractions was investigated in different types of low temperature plasma generated in pure argon and argon with titanium in order to determine metastable state densities of argon and ground state density of titanium.
Related projects:	Plazmochemické procesy a jejich technologické aplikace CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy