Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition

Investor logo
Investor logo

Warning

This publication doesn't include Faculty of Sports Studies. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel BURŠÍKOVÁ Vilma

Year of publication 2012
Type Article in Proceedings
Conference Vrstvy a povlaky 2010: Zborník prednášok
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords hybrid PVD-PECVD; magnetron sputtering
Description This paper dsiscusses the tybrid PVD-PECVD process and its application for carbon ritch nanocomposite thin film deposition
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info